Optimized Cantilever Sensor Based on Parallel High Dielectric Material

چکیده مقاله

Cantilever is dramatically used as a resonator sensor to detect the presence of a particular molecule or cell in an environment and to measure their amount. Electrostatic force is commonly used to actuate MEMS based cantilevers to resonate because a cantilever has a simple capacitor structure. In this paper, a novel design is proposed to optimize the cantilevers performance by use of high dielectric material in its capacitor structure. The mathematical model of the proposed design and the performance of the cantilever sensor and its quality has been evaluated and reported by finite element simulations in this way.