| Authors | Amin Eidi |
|---|---|
| Journal | Sensing and Imaging - Springer |
| Paper Type | Original Research |
| Published At | 22 March 2022 |
| Journal Grade | ISI |
| Journal Type | Typographic |
| Journal Country | Iran, Islamic Republic Of |
Abstract
Cantilever is dramatically used as a resonator sensor to detect the presence of a particular molecule or cell in an environment and to measure their amount. Electrostatic force is commonly used to actuate MEMS based cantilevers to resonate because a cantilever has a simple capacitor structure. In this paper, a novel design is proposed to optimize the cantilevers performance by use of high dielectric material in its capacitor structure. The mathematical model of the proposed design and the performance of the cantilever sensor and its quality has been evaluated and reported by finite element simulations in this way.